Spatial distribution of a-Si:H film-producing radicals in silane rf glow discharges
| Author | |
| Year of Publication |
1990
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| Date Published |
Jan-01-1990
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| Journal Title |
Journal of Applied Physics
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| Volume |
67
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| Start Page or Article ID (correct) |
139
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| ISSN Number |
00218979
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| DOI | |
| Download citation | |
| JILA PI | |
Journal Article
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| Publication Status |