@article{4535,
  author = {D. Doughty and Alan Gallagher},
  title = {Spatial distribution of a-Si:H film-producing radicals in silane rf glow discharges},
  year = {1990},
  journal = {Journal of Applied Physics},
  volume = {67},
  pages = {139},
  month = {Jan-01-1990},
  issn = {00218979},
  doi = {10.1063/1.345292},
}