TY - JOUR
AU - D. Doughty
AU - Alan Gallagher
BT - Journal of Applied Physics
DA - Jan-01-1990
DO - 10.1063/1.345292
PY - 1990
EP - 139
T2 - Journal of Applied Physics
TI - Spatial distribution of a-Si:H film-producing radicals in silane rf glow discharges
VL - 67
SN - 00218979
ER -