A common-path heterodyne interferometer for surface profiling in microelectronic fabrication
| Author | |
| Year of Publication |
2001
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| Date Published |
Jan-01-2001
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| Journal Title |
Review of Scientific Instruments
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| Volume |
72
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| Start Page or Article ID (correct) |
2455
|
| ISSN Number |
00346748
|
| DOI | |
| Download citation | |
| JILA PI | |
Journal Article
|
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| Publication Status |