@article{400,
  author = {Eric Klein and Fred Ramirez and John Hall},
  title = {A common-path heterodyne interferometer for surface profiling  in microelectronic fabrication},
  year = {2001},
  journal = {Review of Scientific Instruments},
  volume = {72},
  pages = {2455},
  month = {Jan-01-2001},
  issn = {00346748},
  doi = {10.1063/1.1367353},
}