TY - JOUR
AU - Eric Klein
AU - Fred Ramirez
AU - John Hall
BT - Review of Scientific Instruments
DA - Jan-01-2001
DO - 10.1063/1.1367353
PY - 2001
EP - 2455
T2 - Review of Scientific Instruments
TI - A common-path heterodyne interferometer for surface profiling  in microelectronic fabrication
VL - 72
SN - 00346748
ER -