Author	K. Carleton Stephen Leone
Year of Publication	1987
Date Published	Jan-07-1987
Journal Title	Journal of Vacuum Science \& Technology B: Microelectronics and Nanometer Structures
Volume	5
Start Page or Article ID (correct)	1141
ISSN Number	0734211X
DOI	10.1116/1.583743
Download citation	DOI Google Scholar BibTeX RIS
JILA PI	Stephen Leone
	Journal Article
Publication Status	Published