Reaction mechanism and kinetics of silane pyrolysis on a hydrogenated amorphous silicon surface
| Author | |
| Year of Publication |
1986
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| Date Published |
Jan-01-1986
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| Journal Title |
The Journal of Chemical Physics
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| Volume |
85
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| Start Page or Article ID (correct) |
3623
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| ISSN Number |
00219606
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| DOI | |
| Download citation | |
| JILA PI | |
Journal Article
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| Publication Status |