A critical evaluation of low-energy electron impact cross sections for plasma processing modeling. II: Cl4, SiH4, and CH4
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| Year of Publication |
1992
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| Date Published |
Jan-12-1992
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| Journal Title |
Plasma Chemistry and Plasma Processing
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| Volume |
12
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| Start Page or Article ID (correct) |
477-493
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| ISSN Number |
0272-4324
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| DOI | |
| URL | |
| Download citation | |
Journal Article
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| Publication Status |