JILAn Robert Karl, Jr (center) won the 2018 Karl Urbanek Best Student Paper award at SPIE Advaned Lithography. The award was presented by metrology, inspection, and process control for microlithography conference chair Vladimir Ukrainsev (left), and conference co-chair Ofer Adan (right).
JILA graduate student Robert Karl, Jr won the 2018 Karl Urbanek Best Student Paper award at SPIE Advanced Lithography.
Karl is a graduate student in the Kapteyn-Murnane group at JILA. His paper was entitled, “Characterization and Imaging of Nanostructured Materials using Tabletop Extreme Ultraviolet Light Sources”. The award was presented by metrology, inspection, and process control for microlithography conference chair Vladimir Ukrainsev, and conference co-chair Ofer Adan.
Graduate Student Christina Porter, also from the Kapteyn-Murnane group at JILA, received an honorable mention.
This annual award is sponsered by KLA-Tencor.