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Water Vapor Uptake in Photolithographic Polymers Observed by Infrared Near-Field Scanning Optical Microscopy in a Controlled Environment

TitleWater Vapor Uptake in Photolithographic Polymers Observed by Infrared Near-Field Scanning Optical Microscopy in a Controlled Environment
Publication TypeJournal Article
Year of Publication2003
AuthorsMcDonough, LA, Dragnea, B, Preusser, J, Leone, SR, Hinsberg, WD
JournalThe Journal of Physical Chemistry B
Volume107
Issue21
Pagination4951 - 4954
Date PublishedJan-05-2003
ISSN1520-6106
URLhttp://pubs.acs.org/doi/abs/10.1021/jp022489j
DOI10.1021/jp022489j
Short TitleJ. Phys. Chem. B