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Two-dimensional model of a capacitively coupled rf discharge and comparisons with experiments in the Gaseous Electronics Conference reference reactor

TitleTwo-dimensional model of a capacitively coupled rf discharge and comparisons with experiments in the Gaseous Electronics Conference reference reactor
Publication TypeJournal Article
Year of Publication1995
AuthorsBoeuf, JP, Pitchford, LC
JournalPhysical Review E
Volume51
Issue2
Pagination1376 - 1390
Date PublishedJan-02-1995
ISSN1063-651X
URLhttp://link.aps.org/doi/10.1103/PhysRevE.51.1376
DOI10.1103/PhysRevE.51.1376
Short TitlePhys. Rev. E

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