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SPIE Proceedings Probing limits of acoustic nanometrology using coherent extreme ultraviolet light

TitleSPIE Proceedings Probing limits of acoustic nanometrology using coherent extreme ultraviolet light
Publication TypeConference Paper
Year of Publication2013
AuthorsNardi, D, Hoogeboom-Pot, KM, Hernandez-Charpak, JN, Tripp, M, King, SW, Anderson, EH, Murnane, MM, Kapteyn, HC
EditorStarikov, A, Cain, JP
Conference NameSPIE Advanced LithographyMetrology, Inspection, and Process Control for Microlithography XXVII
Date Published2013-01
PublisherSPIE
Conference LocationSan Jose, California, USA
DOI10.1117/12.2011194