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Independent measurements of force and position in atomic force microscopy

TitleIndependent measurements of force and position in atomic force microscopy
Publication TypeConference Paper
Year of Publication2009
AuthorsChurnside, AB, King, GM, Perkins, TT
EditorPostek, MT
Conference NameSPIE NanoScience + EngineeringInstrumentation, Metrology, and Standards for Nanomanufacturing III
PublisherSPIE
Conference LocationSan Diego, CA
DOI10.1117/12.826567