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Spectroscopic characterization of semiconductor surface impurities by near-field scanning optical microscopy

TitleSpectroscopic characterization of semiconductor surface impurities by near-field scanning optical microscopy
Publication TypeConference Paper
Year of Publication1998
AuthorsSchade, W, Osborn, DL, Preusser, J, Leone, SR
Conference NameLaser Applications to Chemical and Environmental Analysis, Technical Digest (OSA 1998) Vol. 3, p. 131-133
PublisherOptical Society of America , Washington, DC