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Spatial distribution of a-Si:H film-producing radicals in silane rf glow discharges

TitleSpatial distribution of a-Si:H film-producing radicals in silane rf glow discharges
Publication TypeJournal Article
Year of Publication1990
AuthorsDoughty, DA, Gallagher, AC
JournalJournal of Applied Physics
Volume67
Issue1
Pagination139
Date PublishedJan-01-1990
ISSN00218979
DOI10.1063/1.345292
Short TitleJ. Appl. Phys.