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Small particle growth in silane radio-frequency discharges

TitleSmall particle growth in silane radio-frequency discharges
Publication TypeJournal Article
Year of Publication2000
AuthorsChilds, MA, Gallagher, AC
JournalJournal of Applied Physics
Volume87
Issue3
Pagination1076
Date PublishedJan-01-2000
ISSN00218979
DOI10.1063/1.371982
Short TitleJ. Appl. Phys.