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Si/SiO2 interface roughness: Comparison between surface second harmonic generation and x-ray scattering

TitleSi/SiO2 interface roughness: Comparison between surface second harmonic generation and x-ray scattering
Publication TypeJournal Article
Year of Publication1997
AuthorsCundiff, ST, Knox, WH, Baumann, FH, Evans-Lutterodt, KW, Tang, M-T, Green, ML, van Driel, HM
JournalApplied Physics Letters
Volume70
Issue11
Pagination1414
Date PublishedJan-01-1997
ISSN00036951
URLhttp://link.aip.org/link/APPLAB/v70/i11/p1414/s1&Agg=doi
DOI10.1063/1.118592
Short TitleAppl. Phys. Lett.