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Single photon ionization, laser optical probe technique for semiconductor growth

TitleSingle photon ionization, laser optical probe technique for semiconductor growth
Publication TypeConference Paper
Year of Publication1994
AuthorsKunz, AK, Alstrin, AL, Casey, SM, Leone, SR
EditorMathur, JP, Lowell, JK, Chen, RT
Conference NameProceedings of SPIE Vol. 2337, p. 20-27: Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing
DOI10.1117/12.186647