FacebookTwitterInstagramYouTube RSS Feed

Silane dissociation products in deposition discharges

TitleSilane dissociation products in deposition discharges
Publication TypeJournal Article
Year of Publication1990
AuthorsDoyle, JR, Doughty, DA, Gallagher, AC
JournalJournal of Applied Physics
Volume68
Issue9
Pagination4375
Date PublishedJan-01-1990
ISSN00218979
DOI10.1063/1.346186
Short TitleJ. Appl. Phys.