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Radical species involved in hotwire (catalytic) deposition of hydrogenated amorphous silicon

TitleRadical species involved in hotwire (catalytic) deposition of hydrogenated amorphous silicon
Publication TypeJournal Article
Year of Publication2008
AuthorsZheng, W, Gallagher, AC
JournalThin Solid Films
Volume516
Issue6
Pagination929 - 939
Date PublishedJan-01-2008
ISSN00406090
DOI10.1016/j.tsf.2007.05.002
Short TitleThin Solid Films