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Proceedings of SPIE: Characterization of ultrathin films by laser-induced sub-picosecond photoacoustics with coherent extreme ultraviolet detection

TitleProceedings of SPIE: Characterization of ultrathin films by laser-induced sub-picosecond photoacoustics with coherent extreme ultraviolet detection
Publication TypeConference Paper
Year of Publication2012
AuthorsLi, Q, Hoogeboom-Pot, KM, Nardi, D, Deeb, C, King, SW, Tripp, M, Anderson, EH, Murnane, MM, Kapteyn, HC
Conference NameMetrology, Inspection, and Process Control for Microlithography XXVI
PublisherSPIE
Conference LocationSan Jose, California, USA
DOI10.1117/12.916866