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Plasma chemistry in disilane discharges

TitlePlasma chemistry in disilane discharges
Publication TypeJournal Article
Year of Publication1992
AuthorsDoyle, JR, Doughty, DA, Gallagher, AC
JournalJournal of Applied Physics
Volume71
Issue10
Pagination4771
Date PublishedJan-01-1992
ISSN00218979
DOI10.1063/1.350669
Short TitleJ. Appl. Phys.

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