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Pattern characterization of deep-ultraviolet photoresists by near-field infrared microscopy

TitlePattern characterization of deep-ultraviolet photoresists by near-field infrared microscopy
Publication TypeJournal Article
Year of Publication2001
AuthorsDragnea, B, Preusser, J, Szarko, JM, Leone, SR, Hinsberg, WD
JournalJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
Volume19
Issue1
Pagination142
Date PublishedJan-01-2001
ISSN0734211X
DOI10.1116/1.1340662
Short TitleJ. Vac. Sci. Technol. B