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Particle growth in silane-hydrogen discharges

TitleParticle growth in silane-hydrogen discharges
Publication TypeJournal Article
Year of Publication2006
AuthorsKujundzic, D, Gallagher, AC
JournalJournal of Applied Physics
Volume99
Issue3
Pagination033301
Date PublishedJan-01-2006
ISSN00218979
DOI10.1063/1.2168230
Short TitleJ. Appl. Phys.