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Mono- and disilicon radicals in silane and silane-argon dc discharges

TitleMono- and disilicon radicals in silane and silane-argon dc discharges
Publication TypeJournal Article
Year of Publication1986
AuthorsRobertson, RM, Gallagher, AC
JournalJournal of Applied Physics
Volume59
Issue10
Pagination3402
Date PublishedJan-01-1986
ISSN00218979
DOI10.1063/1.336806
Short TitleJ. Appl. Phys.