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Model of particle growth in silane discharges

TitleModel of particle growth in silane discharges
Publication TypeJournal Article
Year of Publication2000
AuthorsGallagher, AC
JournalPhysical Review E
Volume62
Issue2
Pagination2690 - 2706
Date PublishedJan-08-2000
ISSN1063-651X
DOI10.1103/PhysRevE.62.2690
Short TitlePhys. Rev. E