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The location of very small particles in silane RF discharge

TitleThe location of very small particles in silane RF discharge
Publication TypeJournal Article
Year of Publication2001
AuthorsRozsa, K, Bano, G, Gallagher, AC
JournalIEEE Transactions on Plasma Science
Volume29
Issue2
Pagination256 - 260
Date PublishedJan-04-2001
ISSN00933813
DOI10.1109/27.923703
Short TitleIEEE Trans. Plasma Sci.

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