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Ion chemistry in silane dc discharges

TitleIon chemistry in silane dc discharges
Publication TypeJournal Article
Year of Publication1985
AuthorsChatham, H, Gallagher, AC
JournalJournal of Applied Physics
Volume58
Issue1
Pagination159
Date PublishedJan-01-1985
ISSN00218979
DOI10.1063/1.335702
Short TitleJ. Appl. Phys.