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High-resolution imaging system using a tabletop extreme ultraviolet source

TitleHigh-resolution imaging system using a tabletop extreme ultraviolet source
Publication TypeConference Paper
Year of Publication2004
AuthorsZhang, X, Raymondson, DA, Sandhu, AS, Backus, S, Liu, Y, Attwood, DT, Murnane, MM, Kapteyn, HC, Libertun, AR
EditorBiedron, SG, Eberhardt, W, Ishikawa, T, Tatchyn, RO
Conference NameSPIE Proceedings 5534: Optical Science and Technology, Fourth Generation X-Ray Sources and Optics II
PublisherSPIE
Conference LocationDenver, CO
URLhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=849627
DOI10.1117/12.557379