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Growth and Nucleation of Hydrogenated Amorphous Silicon on Silicon (100) Surfaces

TitleGrowth and Nucleation of Hydrogenated Amorphous Silicon on Silicon (100) Surfaces
Publication TypeJournal Article
Year of Publication1995
AuthorsTanenbaum, DM, Laracuente, AL, Gallagher, AC
JournalMRS Proceedings
Volume377
Date PublishedJan-01-1995
DOI10.1557/PROC-377-143
Short TitleMRS Proc.