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Germane discharge chemistry

TitleGermane discharge chemistry
Publication TypeJournal Article
Year of Publication1991
AuthorsDoyle, JR, Doughty, DA, Gallagher, AC
JournalJournal of Applied Physics
Volume69
Issue8
Pagination4169
Date PublishedJan-01-1991
ISSN00218979
DOI10.1063/1.348384
Short TitleJ. Appl. Phys.