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Film quality in relation to deposition conditions of a-SI:H films deposited by the ‘‘hot wire’’ method using highly diluted silane

TitleFilm quality in relation to deposition conditions of a-SI:H films deposited by the ‘‘hot wire’’ method using highly diluted silane
Publication TypeJournal Article
Year of Publication1996
AuthorsMolenbroek, EC, Mahan, AH, Johnson, EJ, Gallagher, AC
JournalJournal of Applied Physics
Volume79
Issue9
Pagination7278
Date PublishedJan-01-1996
ISSN00218979
DOI10.1063/1.361445
Short TitleJ. Appl. Phys.