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Enhancement in the crystalline quality of palladium silicide films: multiple versus single deposition

TitleEnhancement in the crystalline quality of palladium silicide films: multiple versus single deposition
Publication TypeJournal Article
Year of Publication2000
AuthorsMirowski, E, Leone, SR
JournalJournal of Crystal Growth
Volume219
Issue4
Pagination368 - 378
Date PublishedJan-11-2000
ISSN00220248
DOI10.1016/S0022-0248(00)00760-0
Short TitleJournal of Crystal Growth