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Electron-transport, ionization, attachment, and dissociation coefficients in SF6 and its mixtures

TitleElectron-transport, ionization, attachment, and dissociation coefficients in SF6 and its mixtures
Publication TypeJournal Article
Year of Publication1988
AuthorsPhelps, AV, Van Brunt, RJ
JournalJournal of Applied Physics
Volume64
Issue9
Pagination4269
Date PublishedJan-01-1988
ISSN00218979
DOI10.1063/1.341300
Short TitleJ. Appl. Phys.