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Electron and heavy particle collision processes in gas discharges at high E/n

TitleElectron and heavy particle collision processes in gas discharges at high E/n
Publication TypeConference Paper
Year of Publication1990
AuthorsJelenković, BM, Petrović, ZLj., Phelps, AV
EditorDubreuil, B
Conference Name10th European Sectional Conference on the Atomic and Molecular Physics of Ionized Gases : ESCAMPIG '90, Special Workshop on Plasma Etching and Deposition : Modelling and Diagnostics
Conference LocationOrleans, France