Facebook Twitter Instagram YouTube

Deposition rates in direct current diode sputtering

TitleDeposition rates in direct current diode sputtering
Publication TypeJournal Article
Year of Publication1993
AuthorsStutzin, GC, Rozsa, K, Gallagher, AC
JournalJournal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Volume11
Issue3
Pagination647
Date PublishedJan-05-1993
ISSN07342101
DOI10.1116/1.578786
Short TitleJ. Vac. Sci. Technol. A

JILA follows the six University nodes' policies for ensuring harassment-free environments. For more detailed information regarding the University of Colorado policies, please read the Discrimination and Harassment Policy and Procedures.