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A critical evaluation of low energy electron impact cross sections for plasma processing modeling: (I) Cl2, F2, and HCl; (II) CF4, SiH4, and CH4

TitleA critical evaluation of low energy electron impact cross sections for plasma processing modeling: (I) Cl2, F2, and HCl; (II) CF4, SiH4, and CH4
Publication TypeReport
Year of Publication1991
AuthorsMorgan, WL
Series TitleJILA Data Center Report
Document Number34
Date Published06/1991
InstitutionUniversity of Colorado
CityBoulder, Colorado

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