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A critical evaluation of low-energy electron impact cross sections for plasma processing modeling. I: Cl2, F2, and HCl

TitleA critical evaluation of low-energy electron impact cross sections for plasma processing modeling. I: Cl2, F2, and HCl
Publication TypeJournal Article
Year of Publication1992
AuthorsMorgan, WL
JournalPlasma Chemistry and Plasma Processing
Volume12
Issue4
Pagination449 - 476
Date PublishedJan-12-1992
ISSN0272-4324
URLhttp://link.springer.com/10.1007/BF01447254
DOI10.1007/BF01447254
Short TitlePlasma Chem Plasma Process

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