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Coherent diffractive imaging microscope with a tabletop high harmonic EUV source

TitleCoherent diffractive imaging microscope with a tabletop high harmonic EUV source
Publication TypeConference Paper
Year of Publication2013
AuthorsZhang, B, Seaberg, MD, Adams, DE, Gardner, DF, Murnane, MM, Kapteyn, HC
EditorStarikov, A, Cain, JP
Conference NameSPIE Proceedings: Advanced Lithography, Metrology, Inspection, and Process Control for Microlithography XXVII
PublisherSPIE
Conference LocationSan Jose, California, USA
URLhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?doi=10.1117/12.2011615
DOI10.1117/12.2011615