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Chemical imaging of photoresists with coherent anti-Stokes Raman scattering (CARS) microscopy

TitleChemical imaging of photoresists with coherent anti-Stokes Raman scattering (CARS) microscopy
Publication TypeJournal Article
Year of Publication2004
AuthorsPotma, EO, Xie, XS, Muntean, L, Preusser, J, Jones, DJ, Ye, J, Leone, SR, Hinsberg, ED, Schade, W
JournalJ. Phys. Chem. B
Volume108
Pagination1296–1301
Keywordspfc
DOI10.1021/jp030903p