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Cavity Optomechanics with Stoichiometric SiN Films

TitleCavity Optomechanics with Stoichiometric SiN Films
Publication TypeJournal Article
Year of Publication2009
AuthorsWilson, D, Regal, CA, Papp, SB, Kimble, HJ
JournalPhysical Review Letters
Date Published11/2009

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