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Causes of Small Particle Growth in Silane Discharges

TitleCauses of Small Particle Growth in Silane Discharges
Publication TypeConference Paper
Year of Publication2002
AuthorsBano, G, Rozsa, K, Gallagher, AC
Conference NameDusty Plasmas in the New Millennium: Third Conference on the Physics of Dusty Plasmas: AIP Conference Proceedings 649, pp. 152–156
PublisherAIP
Conference LocationDurban (South Africa)
DOI10.1063/1.1527749