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Causes of SiH4 dissociation in silane dc discharges

TitleCauses of SiH4 dissociation in silane dc discharges
Publication TypeJournal Article
Year of Publication1990
AuthorsDoughty, DA, Gallagher, AC
JournalPhysical Review A
Volume42
Issue10
Pagination6166 - 6170
Date PublishedJan-11-1990
ISSN1050-2947
DOI10.1103/PhysRevA.42.6166
Short TitlePhys. Rev. A

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