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Argon sputtering analysis of the growing surface of hydrogenated amorphous silicon films

TitleArgon sputtering analysis of the growing surface of hydrogenated amorphous silicon films
Publication TypeJournal Article
Year of Publication1988
AuthorsLin, G-H, Doyle, JR, He, M, Gallagher, AC
JournalJournal of Applied Physics
Volume64
Issue1
Pagination188
Date PublishedJan-01-1988
ISSN00218979
DOI10.1063/1.341461
Short TitleJ. Appl. Phys.