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Ar, N2, and Cl2 electron cyclotron resonance plasmas measured by time-of-flight analysis: Neutral kinetic energies and source gas cracking

TitleAr, N2, and Cl2 electron cyclotron resonance plasmas measured by time-of-flight analysis: Neutral kinetic energies and source gas cracking
Publication TypeJournal Article
Year of Publication1997
AuthorsGoodman, RS, Materer, N, Leone, SR
JournalJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
Volume15
Issue4
Pagination971
Date PublishedJan-07-1997
ISSN0734211X
DOI10.1116/1.589517
Short TitleJ. Vac. Sci. Technol. B