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The application of scattering cross sections to ion flux models in discharge sheaths

TitleThe application of scattering cross sections to ion flux models in discharge sheaths
Publication TypeJournal Article
Year of Publication1994
AuthorsPhelps, AV
JournalJournal of Applied Physics
Volume76
Issue2
Pagination747
Date PublishedJan-01-1994
ISSN00218979
DOI10.1063/1.357820
Short TitleJ. Appl. Phys.