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Apparatus Design for Glow-Discharge a-Si: H Film-Deposition

TitleApparatus Design for Glow-Discharge a-Si: H Film-Deposition
Publication TypeJournal Article
Year of Publication1987
AuthorsGallagher, AC
JournalInternational Journal of Solar Energy
Volume5
Issue5-6
Pagination311 - 322
Date PublishedJan-12-1987
ISSN0142-5919
DOI10.1080/01425918708914428
Short TitleInternational Journal of Solar Energy