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Analysis of Plasma Properties and Deposition of Amorphous Silicon Alloy Solar Cells Using Very High Frequency Glow Discharge

TitleAnalysis of Plasma Properties and Deposition of Amorphous Silicon Alloy Solar Cells Using Very High Frequency Glow Discharge
Publication TypeJournal Article
Year of Publication1999
AuthorsYan, B, Yang, J, Guha, S, Gallagher, AC
JournalMRS Proceedings
Volume557
Date PublishedJan-01-1999
DOI10.1557/PROC-557-115
Short TitleMRS Proc.