Facebook Twitter Instagram YouTube

Activation of the Si(100)/Cl2 Etching Reaction at High Cl2 Translational Energies

TitleActivation of the Si(100)/Cl2 Etching Reaction at High Cl2 Translational Energies
Publication TypeJournal Article
Year of Publication1991
AuthorsCampos, FX, Weaver, GC, Waltman, CJ, Leone, SR
JournalMRS Proceedings
Volume236
Pagination177-182
Date PublishedJan-01-1991
DOI10.1557/PROC-236-177
Short TitleMRS Proc.

JILA follows the six University nodes' policies for ensuring harassment-free environments. For more detailed information regarding the University of Colorado policies, please read the Discrimination and Harassment Policy and Procedures.